University of Maryland Institute for Research in Electronics and Applied Physics
Institute for Research in Electronics and Applied Physics

Laboratory for Plasma Processing of Materials

Navigation Bar #5

The Laboratory for Plasma Processing of Materials, headed by Prof. Gottlieb Oehrlein, is part of the Institute for Research in Electronics and Applied Physics and the Department of Materials Science and Engineering.

The major scientific theme of this group is non-equilibrium low temperature plasma science as used for production of novel materials and nanoscale structures, along with surface modifications of materials. The latter may either be used to enhance functional properties of materials, or these processes may take place inadvertently, e.g. the erosion of wall materials in a plasma device used for fusion by plasma wall interactions followed by transport in the plasma and possibly mixing with other wall materials. By combining characterization data of gas phase species and gas solid interactions, a scientific understanding of these complex environments is possible. The group utilizes a broad array of specialized gas phase and surface measurement techniques on a set of representative plasma processing devices to obtain the required information, and by collaboration with theoretical and computer modeling efforts achieve a fundamental understanding of plasma-materials interactions. The results are leveraged for novel applications in the microelectronics, nano- and biotechnology fields.

For further information, please contact Dr. Gottlieb Oehrlein.


IREAP Homepage