University of Maryland Institute for Research in Electronics and Applied Physics
Institute for Research in Electronics and Applied Physics

Laboratory for Plasma Processing of Materials

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The Laboratory for Plasma Processing of Materials, headed by Prof. Gottlieb Oehrlein, is part of the Institute for Research in Electronics and Applied Physics and the Department of Materials Science and Engineering. The laboratory is in the Energy Research Facility. The research of the laboratory is aimed at producing nano-structures using plasma processing and establishing the scientific understanding required for the efficient production of nano-structures using this approach. We are also interested in using low temperature plasmas to tailor surface properties of materials.

For further information, please contact Dr. Gottlieb Oehrlein.


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