Plasma Processing

Of Materials

Research Overview

Research Group

Laboratory

Publications

Courses

Visitor Information

Institute for Research in Electronics and Applied

Physics  (IREAP)

Department of Materials Science and Engineering

 

 

 

 

 

 

 


             Gottlieb S. Oehrlein, Professor

Director,

Laboratory for Plasma Processing of Materials

Institute for Research in Electronics and Applied Physics (IREAP) and 

Department of Materials Science and Engineering

University of Maryland, College Park, 20742

   Office: 2119 Chem. & Nuclear Eng. Bldg.

   (301) 405-8931; (301) 405-6327 (Fax)   

   oehrlein@glue.umd.edu

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Education

*  Ph.D., Physics, State University of New York, Albany, Dec. 1981.

*  Vordiplom in Physics, Würzburg University (Germany), Sept. 1976.

 

Areas of Professional Interest

Low-Temperature Plasma Processing of Materials, Plasma-Surface Interactions, Nanolithography and Patterning, Physics and Chemistry of Nanostructure Fabrication

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 Webpage designed by Stefan Oehrlein