Gottlieb Oehrlein, Professor Mailing Address: 2119 Chemical and Nuclear Engineering Bldg. Dept. of Materials Science and Engineering University of Maryland College Park, Maryland 20742 Phone: (301) 405-8931 Email: oehrlein at umd.edu FAX: (301) 405-6327 Joint Appointment: Department of Materials Science and Engineering

Professor Gottlieb Oehrlein has a joint appointment with the Department of Materials Science and Engineering and the Institute for Research in Electronics and Applied Physics, where he heads the Laboratory for Plasma Processing of Materials. He received the Vordiplom in Physics from Würzburg University, Germany, in Sept. 1976 and a Ph.D. in physics from the State University of New York, Albany in Dec. 1981. Dr. Oehrlein is a Fellow of the American Vacuum Society and a Fellow of the International Union of Pure and Applied Chemistry.

Dr. Oehrlein's research interests include: low-temperature plasma processing of materials; plasma-surface interactions, nanolithography and patterning; and the physics and chemistry of nanostructure fabrication.

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