We are part of the Institute for Plasma Research (IPR) at the University of Maryland (UMD).
The work of the laboratory is centered on the generation of ion beams and their application to microfabrication. The program of research includes new applications of high resolution focused ion beams (FIBs) for material science and electronic devices, high brightness ion sources for these systems, ion beam induced chemical reactions, and projects in support of ion projection lithography for full chip exposure.
For more information about the laboratory, click on the appropriate menu item in the left frame.
