A joint Institute of the
College of Computer, Mathematical and
Physical Sciences
and the
A. James Clark School of Engineering
Engineering College Clean Room Located in IREAP
Standard Operating Procedures
Contact Persons: Jim O'Connor, (301) 405-5018, (joconnor at umd.edu), Jon Hummel, (301) 405-5017, (jhummel1 at umd.edu), or Tom Loughran, (301) 405-3642, (tcl at ece.umd.edu).
General Rules
EVG 620 SOP
STS DRIE System SOP
STS ICP SOP
Infrared Wafer Visualization Setup SOP
IREAP Homepage
Clean Room Homepage
Webpage maintained by Dorothea F. Brosius
Created 12/04/03 by DFB
Modified 09/22/05 by DFB