The Engineering College Clean Room has officialy opened for use. This temporary facility is located in 0202 Energy Research Building within the Institute for Research in Electronics and Applied Physics (IREAP). It meets the urgent need for enhanced campus-wide fabrication and capabilities, providing facilities to serve MEMS device fabrication as well as general micro/nano fabrication. The room is open to the entire campus community on a fee-per-use basis. When the Central Clean Room in the Kim Building opens, the equipment from this temporary facility will be moved there.
Clark School Dean Nariman Farvardin (ECE/ISR), several departments, and a number of individual researchers have committed resources to establish the room. The Clean Room Steering Committee includes Reza Ghodssi (ECE/ISR), Elisabeth Smela (ME), Don Devoe (ME), and John Melngailis (ECE). The physical realization of the Clean Room was accomplished by Nolan Ballew, Tom Loughran, John Barry, Bill Grubb, and the members of the Steering Committee.
For information please contact Jim O'Connor, (301) 405-5018, (joconnor at umd.edu), Jon Hummel, (301) 405-5017, (jhummel1 at umd.edu), or Tom Loughran, (301) 405-3642, (tcl at ece.umd.edu).